| 1. Identity statement | ||||
| Reference Type | Conference Paper (Conference Proceedings) | |||
| Site | mtc-m21b.sid.inpe.br | |||
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S | |||
| Identifier | 8JMKD3MGP3W34P/3J8J5G2 | |||
| Repository | sid.inpe.br/mtc-m21b/2015/03.30.19.39 (restricted access) | |||
| Last Update | 2019:08.29.12.16.26 (UTC) simone | |||
| Metadata Repository | sid.inpe.br/mtc-m21b/2015/03.30.19.39.01 | |||
| Metadata Last Update | 2021:03.04.02.46.26 (UTC) administrator | |||
| Secondary Key | INPE--PRE/ | |||
| Citation Key | UedaAbBeBeReGu:2000:HiDoNi | |||
| Title | High dose nitrogen and carbon shallow implantation in Si by plasma immersion ion implantation  | |||
| Year | 2000 | |||
| Access Date | 2024, Apr. 26 | |||
| Secondary Type | PRE CI | |||
| Number of Files | 1 | |||
| Size | 109 KiB | |||
| 2. Context | ||||
| Author | 1 Ueda, Mário 2 Abramof, Eduardo 3 Beloto, Antonio Fernando 4 Berni, Luiz Angelo 5 Reuther, H. 6 Guenzel, R. | |||
| Group | 1 LAP-INPE-MCT-BR 2 LAS-INPE-MCT-BR 3 LAS-INPE-MCT-BR 4 LAS-INPE-MCT-BR | |||
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) | |||
| Author e-Mail Address | 1 ueda@plasma.inpe.br 2 eduardo.abramof@inpe.br 3 beloto@las.inpe.br 4 berni@las.inpe.br | |||
| Conference Name | International Conference on Ion Beam Modification of Materials, 12. | |||
| Conference Location | Canela, RS | |||
| History (UTC) | 2015-03-30 19:39:38 :: simone -> administrator :: 2000 2018-06-04 03:14:32 :: administrator -> simone :: 2000 2019-08-29 12:16:26 :: simone -> administrator :: 2000 2021-03-04 02:46:26 :: administrator -> simone :: 2000 | |||
| 3. Content and structure | ||||
| Is the master or a copy? | is the master | |||
| Content Stage | completed | |||
| Transferable | 1 | |||
| Content Type | External Contribution | |||
| Version Type | publisher | |||
| Area | FISMAT | |||
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > High dose nitrogen... | |||
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > High dose nitrogen... | |||
| doc Directory Content | access | |||
| source Directory Content | there are no files | |||
| agreement Directory Content |
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| 4. Conditions of access and use | ||||
| Language | en | |||
| User Group | simone | |||
| Reader Group | administrator simone | |||
| Visibility | shown | |||
| Read Permission | deny from all and allow from 150.163 | |||
| Update Permission | not transferred | |||
| 5. Allied materials | ||||
| Mirror Repository | sid.inpe.br/mtc-m21b/2013/09.26.14.25.22 | |||
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS | |||
| Citing Item List | ||||
| Host Collection | sid.inpe.br/mtc-m21b/2013/09.26.14.25.20 | |||
| 6. Notes | ||||
| Notes | Publicado em: Nuclear Instruments and Methods in Physics Research B, v.175-177, p.715-720, 2001. | |||
| Empty Fields | abstract archivingpolicy archivist booktitle callnumber copyholder copyright creatorhistory date descriptionlevel dissemination doi e-mailaddress edition editor format isbn issn keywords label lineage mark nextedition numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress resumeid rightsholder schedulinginformation secondarydate secondarymark serieseditor session shorttitle sponsor subject targetfile tertiarymark tertiarytype type url volume | |||
| 7. Description control | ||||
| e-Mail (login) | simone | |||
| update | ||||