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aip.orgtrue10.1063/1.49390132016-01-08New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses
10.1063/1.4939013http://dx.doi.org/10.1063/1.4939013
doi:10.1063/1.4939013New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulsesMario UedaAtaide Ribeiro da SilvaElver J. D. M. PillacaSamantha F. M. MarianoRogério de Moraes OliveiraJosé Osvaldo RossiCarlos Mauricio LepienskiLuc Pichon
2016-01-08trueaip.org10.1063/1.4939013
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